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HORIBA堀场浓度计半导体
产品型号：光纤型高温磷酸浓度计CS-620F
产品品牌：HORIBA堀场浓度计
产品介绍：

HORIBA堀场CS-100 系列为半导体制程各种清洗和刻蚀工艺的药液提供完整的、高精度的化学药液浓度计。除高速响应和紧凑设计等特点外，浓度计还可实时测量每种组分的浓度，通过报警提醒化学药液变化和自动供应的时间。具备执行短周期测量的能力，可准确检测浓度变化。
详细介绍
HORIBA堀场CS-100 系列为半导体制程各种清洗和刻蚀工艺的药液提供完整的、高精度的化学药液浓度计。除高速响应和紧凑设计等特点外，浓度计还可实时测量每种组分的浓度，通过报警提醒化学药液变化和自动供应的时间。具备执行短周期测量的能力，可准确检测浓度变化。
Product name CHEMICAL SOLUTION MONITOR
Model CS-620F
Measurement principle Absorption spectroscopic method
Calculation principle Temperature compensation type multivariate analysis
Sample H3PO4/H2O

Measurable range
Repeatability

  Component Measurable range
(mass%) 		Repeatability
(mass%) 		Analog output
range(mass%)
1st solution H3PO4 85.00-92.00 +/-0.10 85.00-100.00
H2O 8.0-15.0 +/-0.3 0.0-15.0
・ Repeatability is defined by maximum error from average (1 hour).
・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical,
there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions
of Measurement 		1) Measurement interval: Approx. 3 sec. (minimum)
2) Moving average: 16 times
Connection fitting size 1 inch or 3/4 inch
Sample condition Sample temperature: 140 to 170°C
Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour)
Input pressure: 0.2 MPa or less
Pressure fluctuation: 0.02 MPa or less
Flow rate: 1 to 30 L/min
Air(for operation and purge) Connection port: 4 mm O.D. quick joint
Pressure: 0.2 MPa ± 0.02 MPa
Power source 100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumption Approx.85 VA (Transient electric current at the time of the start is excluded)
Communication Parallel I/O, RS-232C, Analog output
Dimension (Monitor) 200 (W) × 308 (D) × 78 (H) mm
(Lamp unit) 200 (W) × 262 (D) × 100 (H) mm
(Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight (Monitor) Approx.3.6 kg
(Lamp unit) Approx.2.8 kg
(Sample cell) Approx.3.0 kg
Ambient temperature (Monitor, Lamp unit) 20 to 30°C
(Optical fiber, Sample cell) 20 to 100°C
* Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity (Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation (Monitor, Lamp unit) Within +/-1 degree
(Sample cell) Please install so that air bubbles do not stay up.
Optical fiber Length: 5 m, Bend radius: R150 mm