HORIBA堀场浓度计半导体
产品型号:HF / HCl 浓度计HF-960H
产品品牌:HORIBA堀场浓度计
产品介绍:

HORIBA堀场CS-100 系列为半导体制程各种清洗和刻蚀工艺的药液提供完整的、高精度的化学药液浓度计。除高速响应和紧凑设计等特点外,浓度计还可实时测量每种组分的浓度,通过报警提醒化学药液变化和自动供应的时间。具备执行短周期测量的能力,可准确检测浓度变化。

详细介绍
HORIBA堀场CS-100 系列为半导体制程各种清洗和刻蚀工艺的药液提供完整的、高精度的化学药液浓度计。除高速响应和紧凑设计等特点外,浓度计还可实时测量每种组分的浓度,通过报警提醒化学药液变化和自动供应的时间。具备执行短周期测量的能力,可准确检测浓度变化。
Model CS-151F1 CS-152F1 CS-150F1
Target of
measurement
SC-1
(ammonia/hydrogen peroxide
aqueous solution)
SC-2
(hydrochloric acid/hydrogen
peroxide aqueous solution)
SPM
(sulfuric acid/hydrogen
peroxide aqueous solution)
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principle Absorption spectrometry
Concentration computation
principle
Temperature-compensated multivariate analysis
Measurement range
(mass %)
NH3: 0.00% to 1.00%
H2O2: 0.00% to 5.00%
H2O: 94.0% to 100.0%
HCI: 0.00% to 2.00%
H2O2: 0.00% to 2.00%
H2O: 96.0% to 100.0%
H2SO4: 70.0% to 96.0%
H2O2: 0.00% to 10.00%
H2O: 4.0% to 30.0%
Repeatability (mass %)
(within ±1% room temperature)
NH3: ±0.15%
H2O2: ±0.30%
H2O: ±1.5%
HCI: ±0.15%
H2O2: ±0.15 %
H2O: ±1.5%
H2SO4: ±0.50%
H2O2: ±0.50%
H2O: ±1.5%
・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type.
・Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature 20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycle Approx. 3 seconds
Content of
LCD and input
• 1st component: measured concentration value (%)   •Error code
• 2nd component: measured concentration value (%)  •Parallel concentration alarm output invalid status
• 3rd component: measured concentration value (%)  •Serial/parallel status
• 1st and 2nd components: concentration alarm status •Background compensation data
RS-232C serial input • Serial/parallel status switching            •Parallel concentration alarm output status
• Measurement data transfer request         (valid/invalid)
• 1st and 2nd component concentration alarm setting  •Target measurement solution switching
Parallel input 12 to 30 V DC (photocoupler insulated)        • Parallel concentration alarm output
• Target measurement solution switching
• Background compensation
Parallel output Open collector output (photocoupler insulated)     • 1st component concentration alarm, 4 types
Max. current when on:                 • 2nd component concentration alarm, 4 types
 DC 5 mA (no internal protection resistor)        • Device error
Max. impressed voltage when off: 30 V DC       • Measuring
 • Target measurement solution type
 • Background compensation status
Solution temperature input Terminal block connection (M3 terminal screws)
• Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output • 1st component concentration alarm, 4 types: 4 to 20 mA
• 2nd component concentration alarm, 4 types: 4 to 20 mA
✽We also support other measurement ranges. Please specify when ordering.
Fiber optic cable Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cell We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
Weight Approx. 11 kg
scrollable

Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.

Schematics

Concentration monitor

Inline cell                                                                                     Cell unit