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Lasertec徕泰掩模检查机及激光显微镜
产品型号:OPTELICS IR
产品品牌:Lasertec徕泰
产品介绍:

Lasertec是日本半导体检测设备龙头,1960 年创立,总部位于横滨,东证上市(6920)。核心产品为EUV 掩模检查机(如 ACTIS A300)、晶圆检测设备、FPD 掩模检查机及激光显微镜

详细介绍


Lasertec是日本半导体检测设备龙头,1960 年创立,总部位于横滨,东证上市(6920)。核心产品为EUV 掩模检查机(如 ACTIS A300)、晶圆检测设备、FPD 掩模检查机及激光显微镜

半导体:晶圆 / 掩模微观形貌、缺陷检查、保护膜 / 光刻胶膜厚

精密加工:刀具、轴承、MEMS 三维轮廓、粗糙度

材料 / 金属:金相、镀层、腐蚀面、粉末微观结构

显示 / 光学:玻璃、滤光片、ITO 膜、微透镜阵列

生物 / 医药:细胞、组织切片、药片表面、粉体颗粒


Lasertec has launched OPTELICS AI2, a new type of confocal microscope designed to perform automatic defect inspection and review. AI2 provides high-speed automatic surface defect inspection, defect mapping, and high-magnification defect shape review from a single platform.


There has been a rapid increase in the demand for semiconductor devices due to the growing need for power semiconductor devices, 5G mobile communication, high-performance computing, and other applications. Semiconductor device manufacturers are expected to keep developing new devices with increased performance. For the commercialization of devices that utlilze new designs and materials, there are numerous challenges that need to be addressed through cross-organizaional efforts, including the evaluation of prototypes, quality control during production, and process improvement for higher yields.


AI2 performs automatic surface defect inspection, defect review, and defect shape 3D profiling on a single platform, serving customer need in various situations of R&D and production.


AI2 achieves both high-throughput, high-speed inspection and high-magnification surface shape profiling by integrating Lasertec's core technology in confocal optics, automatic inspection software perfected through the development of various semiconductor-related inspection systems, and newly designed high-speed motion hardware into a system. AI2 conducts AI-based inspection using deep learning and offers advanced inspection functions such as high-precision image classification, patterned sample inspection, and the extraction of specific types of defects.


Lasertec is dedicated to addressing customer need and helping customers succeed in various R&D and yield improvement efforts.



Lasertec是日本半导体检测设备龙头,1960 年创立,总部位于横滨,东证上市(6920)。核心产品为EUV 掩模检查机(如 ACTIS A300)、晶圆检测设备、FPD 掩模检查机及激光显微镜


  • 半导体:晶圆 / 掩模微观形貌、缺陷检查、保护膜 / 光刻胶膜厚
  • 精密加工:刀具、轴承、MEMS 三维轮廓、粗糙度
  • 材料 / 金属:金相、镀层、腐蚀面、粉末微观结构
  • 显示 / 光学:玻璃、滤光片、ITO 膜、微透镜阵列
  • 生物 / 医药:细胞、组织切片、药片表面、粉体颗粒


Lasertec has launched OPTELICS AI2, a new type of confocal microscope designed to perform automatic defect inspection and review. AI2 provides high-speed automatic surface defect inspection, defect mapping, and high-magnification defect shape review from a single platform.

There has been a rapid increase in the demand for semiconductor devices due to the growing need for power semiconductor devices, 5G mobile communication, high-performance computing, and other applications. Semiconductor device manufacturers are expected to keep developing new devices with increased performance. For the commercialization of devices that utlilze new designs and materials, there are numerous challenges that need to be addressed through cross-organizaional efforts, including the evaluation of prototypes, quality control during production, and process improvement for higher yields.

AI2 performs automatic surface defect inspection, defect review, and defect shape 3D profiling on a single platform, serving customer need in various situations of R&D and production.

AI2 achieves both high-throughput, high-speed inspection and high-magnification surface shape profiling by integrating Lasertec's core technology in confocal optics, automatic inspection software perfected through the development of various semiconductor-related inspection systems, and newly designed high-speed motion hardware into a system. AI2 conducts AI-based inspection using deep learning and offers advanced inspection functions such as high-precision image classification, patterned sample inspection, and the extraction of specific types of defects.

Lasertec is dedicated to addressing customer need and helping customers succeed in various R&D and yield improvement efforts.